What are the challenges in maintaining high vacuum levels in humid Pakistani climates during MS-HS processes?

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What are the challenges in maintaining high vacuum levels in humid Pakistani climates during MS-HS processes?

Due to high humidity in regions like Karachi and Lahore, achieving and maintaining high vacuum levels in sputtering chambers can be difficult. Moisture can also lead to target contamination and reduced film quality. What specific vacuum pump types, chamber maintenance routines, o r dehumidifying systems are recommended for sputtering operations in such environments?

Talha Kyanii asked on 26 Jul 2025 15:34:43 pm

1 Answer

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Gari Master - on 26 Jul 2025 15:45:12 pm

Humidity introduces moisture into the sputtering chamber, leading to poor vacuum levels and oxidation of both targets and substrates. This affects adhesion and film uniformity.

Recommendations:

Use dry pumps e.g., scroll o r turbomolecular pumps with backing pumps and cold traps.

Install inline desiccant filters o r moisture traps in the vacuum line.

Place a dehumidifier in the sputtering lab, especially during monsoon season.

Regularly bake out the chamber at 100–150°C to remove absorbed water vapor.

Monitor the base pressure, aiming for 10⁻⁶ mbar for better film quality.